RF Power Effect on the Properties of Sputtered ZnO Films...

Journal of Electronic Materials 2012 / 07 Vol. 41; Iss. 7

RF Power Effect on the Properties of Sputtered ZnO Films for Channel Layer Applications in Thin-Film Transistors

M.I. Medina-Montes, H. Arizpe-Chávez, L.A. Baldenegro-Pérez, M.A. Quevedo-López, R. Ramírez-Bon
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Volume:
41
Language:
english
Pages:
8
DOI:
10.1007/s11664-012-1994-9
Date:
July, 2012
File:
PDF, 804 KB
english, 2012
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