Tunneling Atomic Force Microscopy Studies on Surface Growth...

Journal of Electronic Materials 2012 / 08 Vol. 41; Iss. 8

Tunneling Atomic Force Microscopy Studies on Surface Growth Pits Due to Dislocations in 4H-SiC Epitaxial Layers

Noboru Ohtani, Shoji Ushio, Tadaaki Kaneko, Takashi Aigo, Masakazu Katsuno, Tatsuo Fujimoto, Wataru Ohashi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
41
Language:
english
Pages:
4
DOI:
10.1007/s11664-012-2133-3
Date:
August, 2012
File:
PDF, 456 KB
english, 2012
Conversion to is in progress
Conversion to is failed