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Characterization of sputtered ZnO films under different sputter-etching time of substrate
Cui-ping Li, Bao-he Yang, Li-rong Qian, Sheng Xu, Wei Dai, Ming-ji Li, Xiao-wei Li, Cheng-yao GaoVolume:
7
Language:
english
Pages:
6
DOI:
10.1007/s11801-011-1066-z
Date:
November, 2011
File:
PDF, 409 KB
english, 2011