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Iterative tuning of decoupling controller for 3-DOF precision motion stage
Wei Teng, Qingfeng Gao, Xin Wu, Haihua MuVolume:
26
Language:
english
Pages:
7
DOI:
10.1007/s12206-011-1104-6
Date:
February, 2012
File:
PDF, 485 KB
english, 2012