Combined product and tool disturbance estimator for the mix-product process and its application to the removal rate estimation in CMP process
An-Chen Lee, Tzu-Wei Kuo, Chung-Ting MaVolume:
13
Language:
english
Pages:
11
DOI:
10.1007/s12541-012-0062-y
Date:
April, 2012
File:
PDF, 1.32 MB
english, 2012