Deposition and properties of highlyc-oriented of InN films on sapphire substrates with ECR-plasma-enhanced MOCVD
Fuwen Qin, Dong Zhang, Yizhen Bai, Zhenhe Ju, Shuangmei Li, Yucaid Li, Jiaqi Pang, Jiming BianVolume:
31
Language:
english
Pages:
4
DOI:
10.1007/s12598-012-0481-z
Date:
April, 2012
File:
PDF, 295 KB
english, 2012