Characterization and analysis of DLC films with different...

Rare Metals 2012 / 04 Vol. 31; Iss. 2

Characterization and analysis of DLC films with different thickness deposited by RF magnetron PECVD

Yujie Huang, Qi Wang, Mei Wang, Zhenyi Fei, Musen Li
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Volume:
31
Language:
english
Pages:
6
DOI:
10.1007/s12598-012-0491-x
Date:
April, 2012
File:
PDF, 491 KB
english, 2012
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