Plasma-Enhanced CVD Synthesis and Structural...

European Journal of Inorganic Chemistry 2004 Vol. 2004; Iss. 16

Plasma-Enhanced CVD Synthesis and Structural Characterization of Ta2N3

Alexei Yu. Ganin, Lorenz Kienle, Grigori V. Vajenine
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Volume:
2004
Year:
2004
Language:
english
Pages:
7
DOI:
10.1002/ejic.200400227
File:
PDF, 201 KB
english, 2004
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