Silicon nitride for microelectronic applications;...

Silicon nitride for microelectronic applications; Applications and devices: John T. Milek. Pp. 117. Plenum Publishing Corp., New York, 1972. Price: $12.50

Mukunda B. Das
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Volume:
8
Year:
1973
Language:
english
DOI:
10.1016/0025-5408(73)90178-5
File:
PDF, 80 KB
english, 1973
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