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CF incorporated overlayer growth on silicon exposed to a d.c.-excited CF4 plasma
C Lejeune, E Collard, J.P Grandchamp, P Scheiblin, J.P GillesVolume:
193-194
Year:
1990
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(90)90256-d
File:
PDF, 427 KB
english, 1990