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Residual stress and its thermal relaxation in TiN films
Tatsuya Matsue, Takao Hanabusa, Yasukazu IkeuchiVolume:
281-282
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(96)08632-4
File:
PDF, 394 KB
english, 1996