Diamond film growth by pulse-modulated magnetoactive microwave plasma chemical vapour deposition
Akimitsu Hatta, Hidetoshi Suzuki, Ken-ichi Kadota, Toshimichi Ito, Akio HirakiVolume:
281-282
Year:
1996
Language:
english
Pages:
3
DOI:
10.1016/0040-6090(96)08648-8
File:
PDF, 339 KB
english, 1996