Improvement in the stability of amorphous SiN−BN films...

Improvement in the stability of amorphous SiN−BN films prepared by hybrid-plasma-enhanced chemical vapour deposition

Kanji Yasui, Hidetaka Itoh, Tadashi Akahane
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Volume:
281-282
Year:
1996
Language:
english
Pages:
3
DOI:
10.1016/0040-6090(96)08661-0
File:
PDF, 315 KB
english, 1996
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