Improvement in the stability of amorphous SiN−BN films prepared by hybrid-plasma-enhanced chemical vapour deposition
Kanji Yasui, Hidetaka Itoh, Tadashi AkahaneVolume:
281-282
Year:
1996
Language:
english
Pages:
3
DOI:
10.1016/0040-6090(96)08661-0
File:
PDF, 315 KB
english, 1996