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An improvement of positioning accuracy by use of piezoelectric voltage in piezoelectric driven micropositioning system simulation
Jeong-Du Kim, Soo-Ryong NamVolume:
30
Year:
1995
Language:
english
Pages:
9
DOI:
10.1016/0094-114x(95)00016-r
File:
PDF, 381 KB
english, 1995