Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1984 Vol. 1; Iss. 2-3
Laser-induced sputtering of oxides and compound semiconductors
Takeyoshi Nakayama, Mitsuru Okigawa, Noriaki ItohVolume:
1
Year:
1984
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(84)90084-3
File:
PDF, 617 KB
english, 1984