Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1984 Vol. 2; Iss. 1-3
Chemical sputtering by keV ions
R.A. Haring, A.W. Kolfschoten, A.E. De VriesVolume:
2
Year:
1984
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(84)90263-5
File:
PDF, 574 KB
english, 1984