Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1985 Vol. 6; Iss. 3
![](/img/cover-not-exists.png)
Computer simulation of transmission sputtering of thin films and experimental measurements of recoil implantation of gold into silicon
D.S. Karpuzov, J.S. Colligon, H. Kheyrandish, A.E. HillVolume:
6
Year:
1985
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(85)90005-9
File:
PDF, 517 KB
english, 1985