Thermal annealing of Fe implanted Al2O3 in an oxidizing and...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1985 Vol. 7-8; Iss. part-P2

Thermal annealing of Fe implanted Al2O3 in an oxidizing and reducing environment

G.C. Farlow, C.W. White, C.J. McHargue, P.S. Sklad, B.R. Appleton
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Volume:
7-8
Year:
1985
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(85)90429-x
File:
PDF, 615 KB
english, 1985
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