Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1985 Vol. 7-8; Iss. part-P2
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Modification of thin film properties by ion bombardment during deposition
James M.E. Harper, Jerome J. Cuomo, Richard J. Gambino, Harold R. KaufmanVolume:
7-8
Year:
1985
Language:
english
Pages:
7
DOI:
10.1016/0168-583x(85)90489-6
File:
PDF, 710 KB
english, 1985