Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1985 Vol. 12; Iss. 4
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A study of hydrogenation in a high-purity silicon crystal
Chengzhou Ji, Tiansheng Shi, P. WangVolume:
12
Year:
1985
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(85)90504-x
File:
PDF, 355 KB
english, 1985