Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1985 Vol. 7-8; Iss. part-P1
RBS study of the effect of arsenic and phosphorus interfacial segregation upon the sintering of contacts between implanted polycrystalline silicon and aluminum: Silicon(1%)
Nicole Herbots, Maurice Lobet, Fernand Van de WieleVolume:
7-8
Year:
1985
Language:
english
Pages:
9
DOI:
10.1016/0168-583x(85)90566-x
File:
PDF, 821 KB
english, 1985