A technique for optimizing the dose uniformity of a...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1985 Vol. 6; Iss. 1-2

A technique for optimizing the dose uniformity of a magnetic scanning high current implanter

Charles Ehrlich, Adrian Delforge, Reuel Liebert
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Volume:
6
Year:
1985
Language:
english
Pages:
9
DOI:
10.1016/0168-583x(85)90639-1
File:
PDF, 745 KB
english, 1985
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