Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1985 Vol. 12; Iss. 1
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Simulation of isotopic mass effects in sputtering
M.H. Shapiro, P.K. Haff, T.A. Tombrello, Don E. Harrison JrVolume:
12
Year:
1985
Language:
english
Pages:
9
DOI:
10.1016/0168-583x(85)90709-8
File:
PDF, 978 KB
english, 1985