Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1986 Vol. 16; Iss. 2-3
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Damage accumulation in hydrogen-implanted silicon
Barbara Okray HallVolume:
16
Year:
1986
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(86)90010-8
File:
PDF, 526 KB
english, 1986