Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1986 Vol. 16; Iss. 2-3
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Damage accumulation in ceramics during ion implantation
C.J. McHargue, G.C. Farlow, G.M. Begun, J.M. Williams, C.W. White, B.R. Appleton, P.S. Sklad, P. AngeliniVolume:
16
Year:
1986
Language:
english
Pages:
9
DOI:
10.1016/0168-583x(86)90016-9
File:
PDF, 750 KB
english, 1986