Monte Carlo simulation of sputtering and saturation...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1986 Vol. 16; Iss. 4-5

Monte Carlo simulation of sputtering and saturation phenomena for low energy noble gas ions

Juliusz Sielanko, Witold Szyszko
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Volume:
16
Year:
1986
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(86)90093-5
File:
PDF, 557 KB
english, 1986
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