Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1986 Vol. 14; Iss. 4-6
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A comparison between multiple interaction computer simulations and the linear theory of sputtering
Mario M. Jakas, Don E. Harrison JrVolume:
14
Year:
1986
Language:
english
Pages:
7
DOI:
10.1016/0168-583x(86)90151-5
File:
PDF, 759 KB
english, 1986