Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1986 Vol. 15; Iss. 1-6
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Implantation induced CuSn alloys analyzed by RBS
O. Henriksen, B. Perrera, E. Johnson, A. Johansen, L. Sarholt-Kristensen, J.V. Wood, Y. ZysinVolume:
15
Year:
1986
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(86)90297-1
File:
PDF, 649 KB
english, 1986