Identification of diffusing species during metal silicide...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1986 Vol. 15; Iss. 1-6

Identification of diffusing species during metal silicide oxidation by Rutherford backscattering spectrometry

Jiann-Ruey Chen, Bor-Yir Chen, Shou-Gwo Wuu, Yuen-Chung Liu
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Volume:
15
Year:
1986
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(86)90303-4
File:
PDF, 581 KB
english, 1986
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