Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1986 Vol. 13; Iss. 1-3
A planar channeling technique to study the structure of the complexes formed by arsenic in silicon at high arsenic concentrations
G.P. Pokhil, A.F. Tulinov, A.A. Turinge, A.V. Dvurechensky, V.P. PopovVolume:
13
Year:
1986
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(86)90478-7
File:
PDF, 284 KB
english, 1986