Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1986 Vol. 13; Iss. 1-3
Ion-solid interactions during ion beam deposition of 74Ge and 30Si on Si at very low ion energies (0–200 eV range)
N. Herbots, B.R. Appleton, T.S. Noggle, R.A. Zuhr, S.J. PennycookVolume:
13
Year:
1986
Language:
english
Pages:
9
DOI:
10.1016/0168-583x(86)90512-4
File:
PDF, 1.12 MB
english, 1986