Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1986 Vol. 13; Iss. 1-3
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Sputtering of rare gas solids by keV ions
D.J. O'shaughnessy, J.W. Boring, J.A. Phipps, R.E. Johnson, W.L. BrownVolume:
13
Year:
1986
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(86)90517-3
File:
PDF, 459 KB
english, 1986