Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1986 Vol. 13; Iss. 1-3
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Development of microcones induced by contamination lithography
Jörg Linders, Heinz Niedrig, Hans KochVolume:
13
Year:
1986
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(86)90518-5
File:
PDF, 694 KB
english, 1986