Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1986 Vol. 13; Iss. 1-3
Computer simulation of low energy static single crystal sputtering
M. Hou, W. EcksteinVolume:
13
Year:
1986
Language:
english
Pages:
7
DOI:
10.1016/0168-583x(86)90521-5
File:
PDF, 704 KB
english, 1986