Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1986 Vol. 13; Iss. 1-3
Position and shape of sputtering emission spots measured with hemispherical collectors and electron backscattering
Michael Erdmann, Jörg Linders, Heinz Niedrig, Martin SternbergVolume:
13
Year:
1986
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(86)90526-4
File:
PDF, 456 KB
english, 1986