Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1986 Vol. 13; Iss. 1-3
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IMPLNT — A fortran program to calculate the distribution of implanted ions which includes the effects due to sputtering
C.M. DavissonVolume:
13
Year:
1986
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(86)90540-9
File:
PDF, 354 KB
english, 1986