Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1986 Vol. 13; Iss. 1-3
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Sputtering and stress in ion bombarded Au and Ge films
S. Chereckdjian, I.H. WilsonVolume:
13
Year:
1986
Language:
english
Pages:
8
DOI:
10.1016/0168-583x(86)90541-0
File:
PDF, 1.14 MB
english, 1986