Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1986 Vol. 13; Iss. 1-3
![](/img/cover-not-exists.png)
Etching of silicon by SF6 induced by ion bombardment
D.J. Oostra, A. Haring, A.E. De Vries, F.H.M. Sanders, G.N.A. Van VeenVolume:
13
Year:
1986
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(86)90565-3
File:
PDF, 538 KB
english, 1986