Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1986 Vol. 14; Iss. 3
Residual defects in implanted silicon submitted to RTA: Evidence of a chemical effect
C.M. Hasenack, J.P. de Souza, I.J.R. BaumvolVolume:
14
Year:
1986
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(86)90596-3
File:
PDF, 352 KB
english, 1986