Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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The electronic stopping and range profile calculations for high energy implantation of phosphorous into silicon
M. Posselt, W. SkorupaVolume:
21
Year:
1987
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(87)90132-7
File:
PDF, 401 KB
english, 1987