Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Analytical expressions for the internal and kinetic energy distributions of sputtered clusters and molecules
Ronald Hoogerbrugge, Piet G. KistemakerVolume:
21
Year:
1987
Language:
english
Pages:
9
DOI:
10.1016/0168-583x(87)90136-4
File:
PDF, 730 KB
english, 1987