Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 23; Iss. 4
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Preparation of coatings and surface modification by plasma and thermal processes
Toshiro Yamashina, Tomoaki HinoVolume:
23
Year:
1987
Language:
english
Pages:
13
DOI:
10.1016/0168-583x(87)90469-1
File:
PDF, 1.04 MB
english, 1987