Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Novel dielectric/silicon planar structures formed by ion beam synthesis
P.L.F. Hemment, K.J. Reeson, J.A. Kilner, R.J. Chater, C. Marsh, G.R. Booker, J.R. Davis, G.K. CellerVolume:
21
Year:
1987
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(87)90811-1
File:
PDF, 2.28 MB
english, 1987