Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Analysis of buried layers from high dose oxygen ion implantation
S.N. Bunker, P. Sioshansi, M. Sanfacon, A. Mogro-Campero, G.A. SmithVolume:
21
Year:
1987
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(87)90814-7
File:
PDF, 173 KB
english, 1987