Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Plasma filament ion source for high current implanter
E. Yabe, N. Ishizaka, T. Shibuya, A. Tonegawa, K. Takayama, R. Fukui, K. Takagi, R. Kikuchi, K. Okamoto, S. KomiyaVolume:
21
Year:
1987
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(87)90823-8
File:
PDF, 292 KB
english, 1987