Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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The MEVVA ion source for high current metal ion implantation
Ian Brown, Jack WashburnVolume:
21
Year:
1987
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(87)90826-3
File:
PDF, 3.11 MB
english, 1987