Negative ion source (NIABNIS) and preparation of...

Negative ion source (NIABNIS) and preparation of transparent carbon films by negative carbon ion beam deposition

J. Ishikawa, K. Ogawa, K. Miyata, H. Tsuji, T. Takagi
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Volume:
21
Year:
1987
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(87)90827-5
File:
PDF, 272 KB
english, 1987
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