Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Negative ion source (NIABNIS) and preparation of transparent carbon films by negative carbon ion beam deposition
J. Ishikawa, K. Ogawa, K. Miyata, H. Tsuji, T. TakagiVolume:
21
Year:
1987
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(87)90827-5
File:
PDF, 272 KB
english, 1987