Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Plasma compression type hollow cathode ion source
A. Tonegawa, T. Shimoyama, E. Yabe, K. Takayama, K. Takagi, R. Fukui, R. Kikuchi, K. Okamoto, S. KomiyaVolume:
21
Year:
1987
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(87)90829-9
File:
PDF, 165 KB
english, 1987