Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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A high current, high voltage oxygen ion implanter
John P. Ruffell, D.H. Douglas-Hamilton, R.E. Kaim, K. IzumiVolume:
21
Year:
1987
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(87)90833-0
File:
PDF, 1.06 MB
english, 1987