Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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High current ion implanter aimed at clean and dust-free production
K. Komatsu, K. Takagi, O. Tsukakoshi, T. Katagawa, E. Kouno, S. KomiyaVolume:
21
Year:
1987
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(87)90834-2
File:
PDF, 316 KB
english, 1987